Method of inspecting integrated circuits during fabrication

ABSTRACT

A method, system and a computer program product for inspecting integrated circuit chips during fabrication. The method including: selecting an integrated circuit chip at a selected level of fabrication; determining coordinates of potential failures of the integrated circuit chip based on one or more risk of failure analyses performed ancillary to fabrication of the integrated circuit chip; automatically generating one or more enhanced defect inspection regions for inspecting the integrated circuit chip based on the coordinates; automatically selecting one or more enhanced defect inspection parameters for each of the enhanced defect inspection regions based on the one or more risk of failure analyses; and generating an enhanced defect inspection recipe, the enhanced defect inspection recipe including a location on the integrated circuit chip, an enhanced defect inspection parameter and a value for the enhanced defect inspection parameter for each of the one or more enhanced defect inspection regions.

This application is a continuation of copending U.S. patent applicationSer. No. 11/127,616 filed on May 12, 2005.

FIELD OF THE INVENTION

The present invention relates to the field of integrated circuit chipfabrication; more specifically, it relates method and system forinspecting integrated circuit chips for defects during fabrication ofthe integrated circuit chips.

BACKGROUND OF THE INVENTION

The fabrication of integrated circuit chips requires defect inspectionof the integrated circuits at various levels of fabrication in order toobtain data that allows the yields and reliability to be increased andcosts to be decreased. Defect inspection itself is a significantfabrication cost in terms of resource and time and therefore there is anongoing need for methods for improving the effectiveness of defectinspection of integrated circuit chips during fabrication without addingexcessive increased costs to the defect inspection process itself.

SUMMARY OF THE INVENTION

A first aspect of the present invention is a method, comprising:selecting an integrated circuit chip at a selected level of fabrication;determining coordinates of potential failures of the integrated circuitchip based on one or more risk of failure analyses performed ancillaryto fabrication of the integrated circuit chip; automatically generatingone or more enhanced defect inspection regions for inspecting theintegrated circuit chip based on the coordinates; automaticallyselecting one or more enhanced defect inspection parameters for each ofthe one or more enhanced defect inspection regions based on the one ormore risk of failure analyses; and generating an enhanced defectinspection recipe, the enhanced defect inspection recipe including alocation on the integrated circuit chip, an enhanced defect inspectionparameter and a value for the enhanced defect inspection parameter foreach of the one or more enhanced defect inspection regions.

A second aspect of the present invention is a computer system comprisinga processor, an address/data bus coupled to the processor, and acomputer-readable memory unit coupled to communicate with the processor,the memory unit containing instructions that when executed implement amethod for inspecting integrated circuit chips during fabrication, themethod comprising the computer implemented steps of: selecting anintegrated circuit chip at a selected level of fabrication; determiningcoordinates of potential failures of the integrated circuit chip basedon one or more risk of failure analyses performed ancillary tofabrication of the integrated circuit chip; automatically generating oneor more enhanced defect inspection regions for inspecting the integratedcircuit chip based on the coordinates; automatically selecting one ormore enhanced defect inspection parameters for each of the one or moreenhanced defect inspection regions based on the one or more risk offailure analyses; and generating an enhanced defect inspection recipe,the enhanced defect inspection recipe including a location on theintegrated circuit chip, an enhanced defect inspection parameter and avalue for the enhanced defect inspection parameter for each of the oneor more enhanced defect inspection regions.

BRIEF DESCRIPTION OF DRAWINGS

The features of the invention are set forth in the appended claims. Theinvention itself, however, will be best understood by reference to thefollowing detailed description of an illustrative embodiment when readin conjunction with the accompanying drawings, wherein:

FIG. 1 is a flowchart of the method for inspecting integrated circuitsduring fabrication according to the present invention;

FIG. 2 is an illustration of an exemplary wafer on which multipleintegrated circuit chips are fabricated;

FIGS. 3A through 3F illustrate inspection regions of integrated circuitchips according to the present invention;

FIG. 4 is a diagram illustrating inspection region generation accordingto the present invention;

FIG. 5 is a diagram illustrating inspection scanning of an inspectionregion of an integrated circuit according to the present invention;

FIG. 6 is a diagram illustrating adjustment of pixel size according tothe present invention; and

FIG. 7 is a schematic block diagram of a general-purpose computer forpracticing the present invention.

DETAILED DESCRIPTION OF THE INVENTION

Integrated circuit chips are fabricated on substrates called wafers. Asillustrated in FIG. 2 and described infra, there are multiple integratedcircuit chips on a wafer. Often, there are multiple wafers in a lot. Alot is a group of wafers that travel through the fabricator together andare processed similarly at about the same time. Defect inspections aregenerally performed at fabrication levels associated with aphotolithographic process level. Defect inspection plans are oftensample plans, where pre-specified wafers or randomly selected wafers ofa lot of wafers are selected for the various defect inspections requiredfor the various process levels. The same wafers may or may not beinspected at the different defect inspections. Defect inspections aregenerally performed using optical inspection tools such as KLA-TencorModel 23XX series (including 2351, 2370, 2371, 2365), manufactured byKLA-Tencor, Milpitas, Calif. running edge and image density comparatorsoftware programs and voltage contrast scanning electron microscopes(SEMs) such as KLA-Tencor Model ES31 manufactured by KLA-Tencor,Milpitas, Calif. running edge and image density comparator softwareprograms. For both types of tools, images are captured electronically asa set of grayscale pixels which are analyzed by the edge and densitydetection software programs.

FIG. 1 is a flowchart of the method for inspecting integrated circuitsduring fabrication according to the present invention. The stepsillustrated in FIG. 1 are repeated for each defect inspection level as agiven lot of wafers is routed through during fabrication. In step 100,the first/next wafer to be inspected is selected and then in step 105,the first/next integrated circuit chip to be inspected of the previouslyselected wafer is selected. In step 110, it is determined if an enhanceddefect inspection is to be performed. An enhanced defect inspection isan inspection in which the inspection regions and values for inspectionparameters as defined infra are adjusted based on risk of failureanalyses performed ancillary to fabrication of the integrated circuitchip.

If in step 110 it is determined that enhanced defect inspection is notrequired, then the method proceeds to step 115. In step 115, a standarddefect inspection recipe is selected. A defect inspection recipe is aset of instructions issued to a defect inspection tool. A recipeincludes which regions of the integrated circuit chip to inspect andwhat values of inspection parameters to use in each region. Theinspection parameters include pixel size, threshold grayscale level,scan speed, light wavelength, illumination mode and accelerationvoltage. Light wavelength and illumination mode apply only to opticaldefect inspection tools. Examples of illumination mode include edgecontrast and bright field. Acceleration voltage is specific to SEMinspection tools. These parameters need not be the same for everyintegrated circuit chip inspected on a given wafer or the same fromwafer to wafer in a lot or the same from lot to lot. Standard defectinspection recipes utilize pre-defined standard inspection regions andpre-defined values for defect inspection parameters and do not changefrom wafer to wafer in a lot or from lot to lot for a given integratedcircuit chip design (or part number). Standard defect inspection recipesdiffer from enhanced defect inspection recipes in that standard defectinspection recipes tend to remain unchanged from integrated circuit chipto integrated circuit chip, wafer to wafer and lot to lot over extendedperiods of time, for example, over several weeks or months, whileenhanced defect inspection recipes may be dynamically created forindividual integrated circuit chips, though the same enhanced defectinspection recipe may be used for different integrated circuit chips,wafers of lots of wafers.

After a standard defect inspection recipe is selected in step 115, instep 120 it is determined if any regions of the integrated circuit chipare to be excluded. If in step 120, regions are to be excluded frominspection then in step 125, the coordinates of the exclusion regionsare retrieved and in step 130, the inspection regions of the currentdefect inspection recipe are modified and the method proceeds to step135. Locations on an integrated circuit chip are referenced by an X-Ycoordinate system from a reference structure on the integrated circuitchip, usually in the kerf. There are many reasons why regions may beexcluded from inspection. For example, a known mask defect causingrepeating defects that would skew or degrade signal-to-noise for unknowndefects in an otherwise random sample may be excluded by not inspectinga region around the coordinates of the known defect. For example, ifinspection is stopped when a limit of 50 defects are found, a largenumber of these could be known defects and inspection would be stoppedbefore unknown defects were found. SEM inspection is particularlysusceptible to this problem. If in step 120, there are no regions to beexcluded from inspection, then the method proceeds directly to step 135.

In step 135, an analysis of time to run the current recipe versus amaximum amount of inspection tool time allowed may be performed, and therecipe, particularly the inspection parameters, is adjusted according topredetermined priorities in a reiterate process until an acceptableinspection time results. Generally, for standard defect inspectionrecipes step 135 need not be performed.

In step 140, the integrated circuit chip is scanned and inspected and instep 145, the defect inspection database updated. Next in step 150, itis determined if another integrated circuit chip from the same wafer isto be inspected. If it is determined in step 150 that another integratedcircuit chip from the same wafer is to be inspected, the method loopsback to step 105, otherwise the method proceeds to step 155. Next instep 155, it is determined if another wafer from the same lot of wafersis to be inspected. If it is determined in step 155 that another lot isto be inspected, the method loops back to step 100, otherwise the methodis complete.

Returning to step 110, if in step 110 it is determined that an enhanceddefect inspection is to be performed, the method proceeds to step 160.In step 160, the coordinates for regions to receive enhanced defectinspections are selected and guard bands placed around the coordinates.In the case where a single coordinate point is retrieved, the guard bandpositions an inspection perimeter around that point to generate anenhanced defect inspection region. In the case where the region isalready defined by retrieved coordinates, a guard band may or may not beplaced around the region. Creation of enhanced defect inspection regionsis based on one or more risk of failure analyses performed ancillary tofabrication of the integrated circuit, seven examples of which are giveninfra.

In a first example, creation of enhanced defect inspection regions maybe based on optical rules checking (ORC). Optical rules checking is mostcommonly an advanced component of an optical proximity correction (OPC)process flow. In model-based OPC, a simulation model of the lithographicsystem (photomask, photolithographic tool and developing system) isemployed to evaluate the effect of moving planned photomask image edgeson a simulated developed image. Model convergence is achieved bycomparing the result to the engineering specification for that image.This is done iteratively until the planned photomask edge placementcorrections are either below the mask edge placement grid, in which casefurther corrections have no further impact on the simulated image, or anexternal constraint (such as mask build limitations on minimum chrome orclear sizes) is reached which prevents further edge movement, leavingthe model converged to a sub-optimal solution. Particularly for caseswhere the model cannot achieve desired convergence due to externalboundary restrictions, the OPC process flow ideally includes an ORCcomponent that compares the simulated print image result against theengineering specifications for each part of the circuit layout. As partof this ORC process a rank ordered list is generated with the imagesfurthest from convergence and not meeting their image sizespecifications and/or most likely to lead to catastrophic defects onwafer. For each ORC-flagged site, X-Y coordinates are generated.

In a second example, creation of enhanced defect inspection regions maybe based on waivers to critical dimension restrictions of photoresist oretched images issued by engineering. The X-Y coordinates are generatedvia either automated searches for circuits in violation of the standarddimension restrictions or other tagging methods that identify thewaivered regions.

In a third example, creation of enhanced defect inspection regions maybe based on exposure tool topology data. Advanced photolithography toolshave the capability for measuring local focus error across asimultaneously exposed swath of an integrated circuit chip and recordingthe value of the focus error in X-Y wafer coordinates. In one example,an enhanced defect inspection region is established for each focus errordata point higher that a predetermined value. While, the adjustment offocus in an exposure tool based on a topographic surface map of thewafer is not ancillary to fabrication of the integrated circuit chip,analysis of the resulting focus error data for the purposes of defectinspection is ancillary because focus error is not an output of theexposure tool per se. The output of the exposure tool is a topographicalmap that can be converted to focus error.

In a fourth example, creation of enhanced defect inspection regions maybe based on photomask inspection data such as the X-Y location on themask reticle of repairs and printing simulation of photomask regionsbased on actual photomask measurements. As with ORC, the results ofthese print simulations may be ranked in order of risk; specifically theanticipated error from designed target dimension on wafer.

In a fifth example, creation of enhanced defect inspection regions maybe based on physical failure analysis of similar or identical integratedcircuit chips. It may be desirable to inspect circuits that are known tobe failing on a regular or periodic basis more closely than would bepossible with a standard defect inspection recipe.

In a sixth example, creation of enhanced defect inspection regions maybe based on process-limited-yield (PLY) trends for the level beinginspected. Frequency analysis of PLY data may be easily adapted tocreate and modify enhanced defect inspection regions.

In a seventh example, creation of enhanced defect inspection regions maybe based on prior level defect inspection data. Often a defect detectedon a prior level can cause defects in a later level.

All of the above analyses, singularly or in combination could be used toexclude regions from inspection as well as identify regions for enhanceddefect inspection.

In step 165, the inspection parameter values for each enhanced defectinspection region are generated. As stated supra, inspection parametersinclude pixel size, threshold grayscale level, scan speed, lightwavelength and mode. There are many ways inspection parameter values maybe generated. In one example, a table of pre-selected inspectionparameters is cross-referenced by the analyses used to generate theenhanced defect inspection region. For example, if the analyses used togenerate the enhanced defect inspection region are ORC-based, a firstset of defect inspection parameters is selected and if the analyses usedto generate the enhanced defect inspection region are topology-basedthen a second set of inspection parameters may be selected. Within setsof defect inspection parameters, sub-sets of defect inspection parametervalues may be selected. For example, the pixel size parameter may be setto different values based on ORC ranking, with higher ranking failuresreceiving smaller pixel sizes. In another example, the defect inspectionparameters may be based on the minimum line width/space of the images ordensity in a given enhanced defect inspection region and the pixel sizevalue selected on that basis, smaller images or denser regions gettingsmaller pixels.

Next in step 170, an enhanced defect inspection recipe is created. Theenhanced defect inspection recipe is similar to a standard defectinspection recipe described supra in reference to step 115. In step 175,it is determined if the enhanced defect inspection is to be performedalone or if it is to be merged with a standard defect inspection recipe.If the enhanced defect inspection is to be performed alone, the methodproceeds to step 135, otherwise the method proceeds to step 180.

In step 180, a standard defect inspection recipe is selected similarlyas to what was done in step 115 and in step 185, the standard andenhanced defect recipes are merged. In one example, the merging processminimizes the X-Y stage movements of the defect inspection tool. Themethod then proceeds to step 120.

FIG. 2 is an illustration of an exemplary wafer on which multipleintegrated circuit chips are fabricated. In FIG. 2, a wafer 200 includesa multiplicity of integrated circuit chips 205 separated by a kerfregions (also known as streets) 210. In FIG. 2, there are 52 integratedcircuit chips 205 in 13 groups of 4 chips. The groups of four occurbecause, in this example, the mask reticle contains four chips, 1, 2, 3and 4. Since it is time/cost prohibitive to inspect all 52 chips onevery lot of every wafer, sample plans are often used. For example, 13defect inspection templates may be created, each inspecting a differentfour chips in different reticle positions, and a different template, inrotation, used for each wafer inspected. Since not all wafers in a lotmay be inspected at any given level, the rotation of templates mayextend across different wafers of different lots. The enhanced defectinspection method of the present invention may require overriding thetemplates in cases, for example when the enhanced defect inspectionregion is the result of mask data affecting only one chip on amulti-chip reticle. For example, if a template calls for four integratedcircuit chips having chips A, B, C and D indicated to be inspected, butintegrated circuit chip E on a different set of four chips has beenidentified for an enhanced defect inspection, integrated circuit chip Emay be added to the template or substituted for another chip in the samereticle position in the template. In the present example, assumingsubstitution is chosen, integrated circuit chip E would be substitutedfor integrated circuit chip D. Integrated circuit chip E is bydefinition, inspected in enhanced defect inspection mode, but it ispossible for the defect inspection recipes (excluding inspection region)of the A, B, C and E integrated circuit chips to otherwise be the same.In the case of a single integrated circuit chip reticle, integratedcircuit chip E may be substituted for any of integrated circuit chips A,B, C and D.

FIGS. 3A through 3F illustrate inspection regions of integrated circuitchips according to the present invention. In FIG. 3A, standard defectinspection regions 220 and 225 are illustrated relative to an integratedcircuit chip 215. In FIG. 3B, enhanced defect inspection regions 230,235 and 240 are illustrated relative to integrated circuit 215. In FIG.3C, excluded inspection regions 245 and 250 are illustrated relative tointegrated circuit 215. Regions 245 and 250 are regions of integratedcircuit chip 215 not to be inspected. There are four ways to combineFIGS. 3A, 3B and 3C to obtain inspection regions (and correspondinginspection parameter values) according to the present invention.

In FIG. 3D, standard defect inspection regions 220 (see FIG. 3A) and 225and enhanced defect inspection regions 230, 235 and 240 are merged andare illustrated relative to integrated circuit 215. It should be noted anew standard defect inspection region 220A is defined which excludes allregions of standard defect inspection region 220 (see FIG. 3A)overlapped by enhanced defect inspection region 230 in order to avoidduplicate inspection. In FIG. 3E, standard defect inspection regions 220(see FIG. 3A) and 225 and excluded from inspection regions 245 and 250are merged and are illustrated relative to integrated circuit 215. Itshould be noted a new standard defect inspection region 220B is definedwhich excludes all regions of standard defect inspection region 220 (seeFIG. 3A) overlapped by excluded inspection region 245. In FIG. 3F,standard defect inspection regions 220 (see FIG. 3A) and 225, enhanceddefect inspection regions 230, 235 and 240 (see FIG. 3D) and excludedinspection regions 245 and 250 (see FIG. 3C) are merged and areillustrated relative to integrated circuit 215. It should be noted newstandard defect inspection regions 220C and 220D are defined whichexcludes all regions of standard defect inspection region 220 (see FIG.3A) overlapped by enhanced defect inspection region 230 and excludedregion 245 (see FIG. 3C). In FIG. 3G, enhanced defect inspection regions230, 235 and 240 (see FIG. 3B) are merged and new enhanced defectinspection region 240A defined.

FIG. 4 is a diagram illustrating inspection region generation accordingto the present invention. In FIG. 4, three exemplary methods forgenerating enhanced defect inspection regions on integrated circuit chip215 are illustrated. In a first method a guard band 245 having a foursides equidistance from an X-Y coordinate point 250 and parallel to thesides of integrated circuit chip 215 defines an enhanced defectinspection region 255. In a second method, a series of guard bands 260each having sides equidistant from corresponding X-Y coordinate points265 and parallel to the sides of integrated circuit chip 215 areintegrated to define the smallest possible rectangular shape for anenhanced defect inspection region 270. In a third method, two coordinatepoints 285A and 285B define an enhanced defect inspection region 280having sides parallel to the ides of integrated circuit chip 215.

FIG. 5 is a diagram illustrating inspection scanning of an inspectionregion of an integrated circuit according to the present invention. InFIG. 5, a wafer 287 includes integrated circuit chips A through P. Inorder to inspect integrated circuit chip B, integrated circuits chips A,B and C are inspected and compared. In order to inspect integratedcircuit chip K, integrated circuits chips J, K and L are inspected andcompared. This procedure is repeated until all integrated circuit chipscalled out by the current template as incorporated into the defectinspection recipe have been inspected. For edge integrated circuit chips(A, E, I, M, D, H, K and P), the two previous or subsequent integratedcircuits in the scan order are used in the three-way comparison.

There is also an array mode inspection which is performed in a mannersimilar to chip-chip inspections. In this case, you may have a steadilyrepeating structure like SRAM or a test macro within a chip, the variousinstances of the repeating structure would be compared to each other.Determinations to perform enhanced defect inspection or eliminateinspection regions also apply to these repeating structures.

FIG. 6 is a diagram illustrating adjustment of pixel size according tothe present invention. In FIG. 6, a standard defect inspection region290 and an enhanced defect inspection region 295 are identical in sizeand shape. However, standard defect inspection region 290 contains onlythree pixels A, B and C while enhanced defect inspection region contains12 pixels A through L.

Generally, the method described herein with respect to inspectingintegrated circuits during fabrication is practiced with an inspectiontool under the control of a general-purpose computer and the method maybe coded as a set of instructions on removable or hard media for use bythe general-purpose computer. FIG. 7 is a schematic block diagram of ageneral-purpose computer for practicing the present invention. In FIG.7, computer system 300 has at least one microprocessor or centralprocessing unit (CPU) 305. CPU 305 is interconnected via a system bus310 to a random access memory (RAM) 315, a read-only memory (ROM) 320,an input/output (I/O) adapter 325 for a connecting a removable dataand/or program storage device 330 and a mass data and/or program storagedevice 335, a user interface adapter 340 for connecting a keyboard 345and a mouse 350, a port adapter 355 for connecting a data port 360 and adisplay adapter 365 for connecting a display device 370. Data port 360is optionally linked to inspection tools 375 in order to transfer thedefect inspection recipes directly to the inspection tools.Alternatively, the defect inspection recipes may be written to removablestorage device 330 and the removable storage device placed into a I/Oadapter of an inspection tool, to transfer the defect inspection recipeto the defect inspection tool. Data port 360 is linked to databases 380containing the data from the risk of failure analyses performedancillary to fabrication of the integrated circuit described supra.Database 380 is linked to all of the systems within the integratedcircuit fabricator that required to select inspection regions andparameters for those inspection regions.

ROM 320 contains the basic operating system for computer system 300. Theoperating system may alternatively reside in RAM 315 or elsewhere as isknown in the art. Examples of removable data and/or program storagedevice 330 include magnetic media such as floppy drives and tape drivesand optical media such as CD ROM drives. Examples of mass data and/orprogram storage device 335 include hard disk drives and non-volatilememory such as flash memory. In addition to keyboard 345 and mouse 350,other user input devices such as trackballs, writing tablets, pressurepads, microphones, light pens and position-sensing screen displays maybe connected to user interface 340. Examples of display devices includecathode-ray tubes (CRT) and liquid crystal displays (LCD).

A computer program with an appropriate application interface may becreated by one of skill in the art and stored on the system or a dataand/or program storage device to simplify the practicing of thisinvention. In operation, information for or the computer program createdto run the present invention is loaded on the appropriate removable dataand/or program storage device 330, fed through data port 360 or typed inusing keyboard 345.

Thus the present invention provides a method and system for improvingthe effectiveness of defect inspection of integrated circuit chipsduring fabrication without adding excessive increased costs to thedefect inspection process itself.

The description of the embodiments of the present invention is givenabove for the understanding of the present invention. It will beunderstood that the invention is not limited to the particularembodiments described herein, but is capable of various modifications,rearrangements and substitutions as will now become apparent to thoseskilled in the art without departing from the scope of the invention.Therefore, it is intended that the following claims cover all suchmodifications and changes as fall within the true spirit and scope ofthe invention.

1. A computer program product, comprising a computer usable mediumhaving a computer readable program code embodied therein, said computerreadable program code comprising an algorithm adapted to implement amethod for inspecting integrated circuit chips during fabrication, saidmethod comprising the steps of: storing coordinates of potentialfailures of an integrated circuit chip based on one or more risk offailure analyses performed ancillary to fabrication of said integratedcircuit chip; automatically generating one or more enhanced defectinspection regions for inspecting images of said integrated circuit chipbased on said coordinates; automatically selecting one or more enhanceddefect inspection parameters for each of said one or more enhanceddefect inspection regions based on said one or more risk of failureanalyses; generating an enhanced defect inspection recipe, said enhanceddefect inspection recipe including locations of said one or moreenhanced defect inspection regions on said integrated circuit chip, anenhanced defect inspection parameter and a value for said enhanceddefect inspection parameter for each of said one or more enhanced defectinspection regions; and transferring a defect inspection recipe based onsaid enhanced defect inspection recipe to a defect inspection tool. 2.The computer program product of claim 1, the method further including:performing an analysis of an amount of time required to inspect saidintegrated circuit chip using said enhanced defect inspection recipe andmodifying said enhanced defect inspection recipe if said amount of timeexceeds a predetermined amount of inspection time.
 3. The computerprogram product of claim 1, the method further including: removing oneor more pre-determined defect inspection regions from said enhanceddefect inspection recipe.
 4. The computer program product of claim 1,the method further including: storing a standard defect inspectionrecipe including one or more predefined standard defect inspectionregions and corresponding predefined standard defect inspectionparameters and predefined standard defect inspection parameter values.5. The computer program product of claim 4, the method furtherincluding: merging said standard defect inspection recipe with saidenhanced defect inspection recipe to generate a merged defect inspectionrecipe.
 6. The computer program product of claim 5, the method furtherincluding: performing an analysis of an amount of time required toinspect said integrated circuit chip using said merged defect inspectionrecipe and modifying said merged defect inspection recipe if said amountof time exceeds a predetermined amount of inspection time.
 7. Thecomputer program product of claim 5, the method further including:removing one or more pre-determined defect inspection regions from saidmerged defect inspection recipe.
 8. The computer program product ofclaim 5, the method further including, storing said merged defectrecipe.
 9. The computer program product of claim 5, where said defectinspection recipe is said merged defect inspection recipe.
 10. Thecomputer program product of claim 1, the method further including,storing said defect inspection recipe.
 11. The computer program productof claim 1, wherein said defect inspection parameters are selected fromthe group consisting of pixel size, threshold grayscale level, scanspeed, light wavelength, illumination mode and acceleration voltage. 12.The computer program product of claim 1, wherein each of said one ormore enhanced defect regions is a less than whole portion of an activearea of said integrated circuit chip.
 13. The computer program productof claim 1, the method further including: formatting said defectinspection recipe for use by an optical inspection tool.
 14. Thecomputer program product of claim 1, the method further including:formatting said defect inspection recipe for use by scanning electronmicroscope.
 15. The computer program product of claim 1, where saiddefect inspection recipe is said enhanced defect inspection recipe.